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SEM with EDS

  • Name: Ultra55 FE-SEM Carl Zeiss EDS
  • Tool No: MNCF 021
  • Make : Carl Zeiss India Pvt. Ltd

 

  • The ultra high resolution Field emission scanning electron microscope coupled with material spectroscopy tools. The ULTRA 55 represents the latest development in GEMINI technology,  a fully integrated High-definition angular selective Backscattered electron (HDAsB) detector. The ULTRA 55 offers ultra high resolution for both SE to image surface information and BSE to present compositional information. The new HDAsB detector features an integrated filtering grid to enhance image quality and requires no additional adjustments. The HDAsB detector is less sensitive for edge contrast and charging effects which enables precise imaging and measurement of boundaries, particles, and features. Combined with the large multi-port analytical chamber, the fully motorised 5-axes motorised eucentric stage and the GEMINI high current mode.
  • The SEM tool is also equipped with Oxford EDS, energy dispersive spectroscopic (EDS) detector and INCA software for compositional  analysis and elemental mapping.